Airy Technology®
Remote Particle Counters
R9501 Remote Airborne
Particle Counter
0.5 – 25.0 µm @ 0.1 CFM
The Airy Technology® R9501 Remote Airborne Particle Counter is designed for continuous monitoring in cleanrooms and other controlled environments. With 30 user-selectable particle size channels ranging from 0.5 up to 25.0 μm and a flow rate of 0.1 CFM (2.83 LPM), these instruments deliver targeted contamination detection with real-time data collection and configurable alarms for immediate incident reporting and local visual alerts.
Calibrated to ISO 21501-4 standards for traceability, the R9501 features onboard storage for redundant data validation and secure user access. The compact, angled enclosures enable installation in tight locations while minimizing disruption to unidirectional airflow. The R9501 supports data reporting in standard cleanroom formats or as mass concentration in μg/m³, with density and refractive index corrections. Optional temperature and relative humidity probes allow integration of three key data points into a single monitoring location.
Built for scalability and long-term reliability, these models utilize durable laser diodes backed by a lifetime warranty, and they deliver exceptional zero-count performance. With seamless connectivity, remote diagnostics, and a standardized architecture, they offer simplified integration and a lower total cost of ownership for critical monitoring applications.
| • 0.1 CFM (2.83 LPM) flow rate |
| • Long life laser diode technology |
| • Measures up to 30 channels of simultaneous data |
| • Accurate in high concentration environments with minimal time to zero-count |
| • Troubleshoot issues remotely from anywhere with an internet connection |
| • Stores up to 65,000 sample records for on-board data redundancy |
| • Optional temperature and relative humidity probe available |
| • Connect via Modbus RTU/ASCII over isolated RS-485, TCP/IP, PoE, or WiFi |
| • Complies with ISO 21501-4 and JIS B9921 standards |
| • Easy to clean, lightweight stainless steel enclosure with minimal particle traps |
| • Versatile mounting options |
| • User configurable alarm light and LED indicators for real-time alerts |
| • Seamless integration into a facility monitoring system |
| • 2 Year Limited Warranty (Extended and Lifetime Warranties available) |
| Model | R9301 | R9501 |
| Size Range | 0.3 μm to 25 μm | 0.5 μm to 25 μm |
| Size Channels | Factory calibrated at 0.3, 0.5, 1.0, 2.5, 5.0, 10.0 μm | Factory calibrated at 0.5, 0.7, 1.0, 2.5, 5.0, 10.0 μm |
| Counting Efficiency | 50% @ 0.3μm; 100% for particles > 0.45 μm per JIS | 50% @ 0.5μm; 100% for particles > 0.75 μm per JIS |
| Flow Rate | 0.1 CFM (2.83 LPM) | |
| Concentration Limits | 10,000,000 particles/ft3 @ 10% coincidence (per ISO 21501-4), | |
| 20,000,000 particles/ft3 @ 10% coincidence (as tested and validated1) | ||
| Light Source | Long life laser diode | |
| Zero Count | < 1 count / 60 minutes (< 1 particles / 6ft3). No fault count subtraction. | |
| Alarms | Channel alarms on Raw counts, concentrations or mass (alarms on environmental sensors optional) | |
| Calibration | NIST traceable | |
| Vacuum Requirements | External vacuum > 15” (38.1cm) of Hg | |
| Filtered Exhaust | Internal HEPA filter | |
| Airflow | Internally monitored | |
| Number of Channels | 6 channels (up to 30 channels of simultaneous data) | |
| Configuration/Download | USB mini-B | |
| Alarm | Alarm LED ring | |
| Communication Modes | MODBUS™ RTU or ASCII outputs (over isolated RS-485), TCP/IP, PoE, or WiFi | |
| Optional Environmental Sensor | Temp and RH probe 32º to 122ºF (0º to 50ºC) ±1ºF (0.5ºC), 15-90% ±2% relative humidity | |
| Standards | ISO 21501-4 and JIS B9921 | |
| Instrument Calibration | Recommended minimum once per year | |
| External Surface | Stainless steel | |
| Dimensions (L x W x H) | 3.5” x 1.8” x 5.2” (8.9 cm x 4.6 cm x 13.2 cm) including probes and connectors | |
| Weight | 1.08 lb. (494 grams) | |
| Accessories | Terminal block plug, User Manual, and Instrument Management Software (USB Key) | |
| Optional Accessories | Printed manual, barb fittings, mounting bracket, sample tubing, zero-count filter, and temp./RH probe | |
| Buffer Memory | 65,000 sample records (rotating buffer) including particle count data and environmental data | |
| Sample Time | 1 second to 99 hours | |
| Power | 9 - 24 VDC (< 1.5 watts) | |
| Operating Conditions | 41° to 104°F (5° to 40°C) / 20% to 95% non-condensing | |
| Storage Conditions | 32° to 122°F (0° to 50°C) / Up to 98% non-condensing | |
| Warranty | 2 Year Limited Warranty (Extended and Lifetime Warranties available) | |
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Part Number: AS-99015 | Part Number: EE-80092 | Rechargeable & Removable Part Number: EE-80003A | (For EE-80003A) Part Number: AS-99005A |
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Part Number: EE-80014A | 0.1 CFM (2.83 LPM) Part Number: AS-99002 | 0.1 CFM (2.83 LPM) Part Number: AS-99002A | Connector (5 POS) Part Number: EE-79015A |
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0.1 CFM (2.83 LPM) Part Number: PS-12041 | 0.1 CFM (2.03 LPM) Part Number: PS-12070 | 0.1 CFM (2.83 LPM) Part Number: PS-12022 | 1/8 (Stainless) Part Number: PS-12005 |
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Includes 2 Rolls of Paper Part Number: AS-99011 | Single Roll Part Number: AS-99012 | Cleanroom Paper (10 Pack) Part Number: AS-99013 | 15V ~2A 100-240 VAC Part Number: EE-80127 |
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USA, Japan, Philippines, Taiwan Part Number: EE-80128 | Europe & Korea Part Number: EE-80129 | UK, Malaysia & Singapore Part Number. EE-80130 | China & Australia Part Number: EE-80131 |
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3/8" OD (1/4" ID) Part Number: AS-99019 | 3/8" OD (1/4" ID) Bev-A-Line XX Part Number: AS-99037 | Part Number: MN-24001 | 6ft (1.8m) Part Number: AS-99022 |
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User Manual (Printed) Part Number: MN-24001P | Validation Manual Part Number: MN-24002 |