Airy Technology®
Remote Particle Counters
R9510 Remote Airborne
Particle Counter
0.5 – 25.0 µm @ 1.0 CFM
Airy Technology® R9510 Remote Airborne Particle Counters monitor particle sizes ranging from 0.5 to 25 μm across six user-selectable channels at a flow rate of 1.0 CFM (28.3 LPM). These instruments are designed for collecting particle data in cleanrooms or other controlled environments, and seamlessly integrate with Particles Plus® Software, facility monitoring systems, or local data collection platforms.
The R9510 supports data reporting in standard cleanroom formats or as mass concentration in μg/m³, with density and refractive index corrections. Optional temperature and relative humidity probes allow integration of three key data points into a single monitoring location.
Standardized hardware and firmware across the Airy Technology® product line streamline maintenance and lower the total cost of ownership. With extensive remote diagnostics and a lifetime warranty, the R9510 delivers reliable performance and long-term value.
| • 1.0 CFM (28.3 LPM) flow rate |
| • Long life laser diode technology for reliable performance |
| • Measures up to 30 user-selectable particle size channels |
| • Internal critical orifice provides precise airflow control for consistency |
| • Accurate in high concentration environments with minimal time to zero-count |
| • Troubleshoot issues remotely from anywhere with an internet connection |
| • Stores up to 65,000 sample records for on-board data redundancy |
| • Optional temperature and relative humidity probe available |
| • Connect via Modbus RTU/ASCII over isolated RS-485, TCP/IP, PoE, or WiFi |
| • Complies with ISO 21501-4 and JIS B9921 standards |
| • Easy to clean, lightweight stainless steel enclosure with minimal particle traps |
| • Included mounting bracket |
| • User configurable alarm light and LED indicators for real-time alerts |
| • Seamless integration into a facility monitoring system |
| • 2 Year Limited Warranty (Extended and Lifetime Warranties available) |
| Model | R9510 |
| Size Range | 0.5 μm to 25 μm |
| Size Channels | Factory calibrated at 0.5, 1.0, 2.5, 5.0, 10.0 μm |
| Counting Efficiency | 50% @ 0.5μm; 100% for particles > 0.75 μm per JIS |
| Flow Rate | 1.0 CFM (28.3 LPM) |
| Concentration Limits | 1,500,000 particles/ft3 @ 10% coincidence (per ISO 21501-4), |
| 3,000,000 particles/ft3 @ 10% coincidence (as tested and validated1) | |
| Light Source | Long life laser diode |
| Zero Count | < 1 count / 60 minutes (< 1 particles / 6ft3). No fault count subtraction. No appreciable drift. |
| Alarms | Channel alarms on Raw counts, concentrations or mass (alarms on environmental sensors optional) |
| Calibration | NIST traceable |
| Vacuum Requirements | External vacuum > 15” (38.1cm) of Hg |
| Filtered Exhaust | Internal HEPA filter |
| Airflow | Internally monitored |
| Number of Channels | 6 channels (up to 30 channels of simultaneous data) |
| Configuration/Download | USB mini-B |
| Alarm | Alarm LED ring |
| Communication Modes | MODBUS™ RTU or ASCII outputs (over isolated RS-485) |
| Standards | ISO 21501-4 and JIS B9921 |
| Instrument Calibration | Recommended minimum once per year |
| External Surface | Stainless steel |
| Dimensions (L x W x H) | 3.5” x 1.8” x 5.6” (8.9 cm x 4.6 cm x 14.2 cm) including probes and connectors |
| Weight | 1.08 lb. (494 grams) |
| Accessories | Terminal block plug, User Manual, and Instrument Management Software (USB Key) |
| Optional Accessories | Power Supply, Remote Mounting Bracket, Stainless Steel Barbed Isoprobe (1.0 CFM/28.3 LPM), Purge Filter Assembly, USB-A to USB-Mini cable and Sample & Vacuum Tubing |
| Buffer Memory | 65,000 sample records (rotating buffer) including particle count data and environmental data |
| Sample Time | 1 second to 99 hours |
| Power | 9 - 24 VDC (< 1.5 watts) |
| Operating Conditions | 41° to 104°F (5° to 40°C) / 20% to 95% non-condensing |
| Storage Conditions | 32° to 122°F (0° to 50°C) / Up to 98% non-condensing |
| Warranty | 2 Year Limited Warranty (Extended and Lifetime Warranties available) |
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Part Number: AS-99015 | Part Number: EE-80092 | Rechargeable & Removable Part Number: EE-80003A | (For EE-80003A) Part Number: AS-99005A |
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Part Number: EE-80014A | 0.1 CFM (2.83 LPM) Part Number: AS-99002 | 0.1 CFM (2.83 LPM) Part Number: AS-99002A | Connector (5 POS) Part Number: EE-79015A |
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0.1 CFM (2.83 LPM) Part Number: PS-12041 | 0.1 CFM (2.03 LPM) Part Number: PS-12070 | 0.1 CFM (2.83 LPM) Part Number: PS-12022 | 1/8 (Stainless) Part Number: PS-12005 |
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Includes 2 Rolls of Paper Part Number: AS-99011 | Single Roll Part Number: AS-99012 | Cleanroom Paper (10 Pack) Part Number: AS-99013 | 15V ~2A 100-240 VAC Part Number: EE-80127 |
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USA, Japan, Philippines, Taiwan Part Number: EE-80128 | Europe & Korea Part Number: EE-80129 | UK, Malaysia & Singapore Part Number. EE-80130 | China & Australia Part Number: EE-80131 |
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3/8" OD (1/4" ID) Part Number: AS-99019 | 3/8" OD (1/4" ID) Bev-A-Line XX Part Number: AS-99037 | Part Number: MN-24001 | 6ft (1.8m) Part Number: AS-99022 |
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User Manual (Printed) Part Number: MN-24001P | Validation Manual Part Number: MN-24002 |